Metal Micromachining

We fabricate thick, high-aspect-ratio, uniform metal and metal-alloy structures that are too small for traditional machining, using advanced, non-traditional microfabrication.

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Small, Innovative Devices Built by Growing Metal, Not Cutting It

VastVision’s metal micromachining program specializes in thick, high-aspect-ratio uniform metal and metal-alloy structures that fall below the reach of conventional machining. Rather than removing material, we grow it: using lithographically defined molds and bottom-up electroforming, finished with precision planarization. The result is functional coatings and 2.5D electroformed parts for demanding applications across quantum, energy, RF, and medical imaging.

From Fundamental Science to Finished Hardware

Fundamental Science

Our metal micromachining work is grounded in electrochemistry research and development, the theoretical and practical basis for depositing dense, uniform, high-aspect-ratio metal:

  • In-house electrochemical R&D for new and refined electrodeposition chemistries

  • Bath formulation and control for uniform grain structure and internal stress

  • Materials characterization to validate composition, density, and mechanical properties

Process Development

Dedicated fabrication labs give us full-spectrum process development, from mask design through finished part:

  • Multiple process-development labs spanning lithography, electroforming, and planarization

  • Rapid iteration on mold geometry, plating parameters, and finishing

  • Process calibration for feature fidelity, uniformity, and repeatability across a wafer

Product Realization

We deliver finished, functional hardware, not just process demonstrations:

  • Functional metal and metal-alloy coatings

  • High-aspect-ratio 2.5D electroformed structures

  • Small, innovative devices too fine for conventional machining

The Process

Three tightly coupled steps take a design from mask to finished, characterized part.

Step 1: Lithography

A precise, photoresist mold is built on a metalized surface. UV exposure transfers the device geometry into the resist, defining the walls the metal will grow within:

  • Thick photoresist processing for tall, steep-walled molds

  • UV exposure and lithographic mask development

  • Class 100 cleanroom processing to protect fine features

Step 2: Electroforming

Metal is grown from the bottom up, not machined from the top down. Jets of metal solution fill high-aspect-ratio molds to build dense, uniform structures:

  • Bottom-up electrofilling of high-aspect-ratio molds

  • Directed electrolyte flow for uniform fill of tall features

  • Metal and metal-alloy deposition with controlled composition

Step 3: Planarization

Formed structures are lapped and polished to a precise, uniform finish using progressively finer diamond media:

  • Lapping and polishing to tight thickness and flatness targets

  • Buffing on polishing wheels of varying hardness

  • Diamond slurries down to 1/10 of a micron

Inside the Facility

Three dedicated laboratories carry a build from lithography through electroforming to final finish, with in-line metrology at every stage.

Lithography Laboratory

Class 100 cleanroom for mold definition and resist processing:

  • Class 100 cleanroom environment

  • Resist spinners and UV exposure stations

  • Ultrasonic and megasonic agitation for develop and clean steps

Electroplating & Characterization Laboratory

Electroforming plus in-line metrology to verify every build:

  • Programmable function generators for plating waveforms

  • Profilometry for thickness and surface measurement

  • X-ray fluorescence spectroscopy for alloy composition

  • Diffusion bonding

Planarization Laboratory

Precision finishing to final tolerance:

  • Multiple polishing wheels of varying hardness

  • Diamond slurries ranging down to 0.1 micron

  • Lapping for flatness and parallelism

Applications

Our metal micromachining capabilities support advanced programs including:

  • Quantum computing

  • Photovoltaics

  • Kilohertz waveguide development

  • Nuclear magnetic resonance imaging

  • Phase-contrast X-ray imaging

  • RF and sensing components

Have a microfabrication challenge?

Tell us which capabilities you need and a bit about your part. A VastVision engineer will walk you through how our lithography, electroforming, and planarization labs apply, and follow up within one business day.

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